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Browse Prior Art Database

Dual-Laser Reflective Scanner

IP.com Disclosure Number: IPCOM000040562D
Original Publication Date: 1987-Dec-01
Included in the Prior Art Database: 2005-Feb-02
Document File: 2 page(s) / 50K

Publishing Venue

IBM

Related People

Forslund, DC: AUTHOR [+4]

Abstract

A method has been proposed to increase the scanning data rate of an optical scanner. The proposal suggests combining dual laser beams with a rotating polygon and other appropriate mirrors and related appurtenances to provide a dual laser beam with parallel array scanning capability. State-of-the-art reflective scanning for optical inspection has been constantly changing. Image size has been increasing while the spot size has been decreasing. However, the image scanning time has not changed. A parallel reflective scanner has been proposed to increase the scanning data rate. The proposed system utilizes an HeNe laser 1 and an Ar ion laser 2, as illustrated in the figure. Since the initial polarization of each coherent beam is in parallel, a half wave plate 3 is placed in the path of the Ar ion laser.

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Dual-Laser Reflective Scanner

A method has been proposed to increase the scanning data rate of an optical scanner. The proposal suggests combining dual laser beams with a rotating polygon and other appropriate mirrors and related appurtenances to provide a dual laser beam with parallel array scanning capability. State-of-the-art reflective scanning for optical inspection has been constantly changing. Image size has been increasing while the spot size has been decreasing. However, the image scanning time has not changed. A parallel reflective scanner has been proposed to increase the scanning data rate. The proposed system utilizes an HeNe laser 1 and an Ar ion laser 2, as illustrated in the figure. Since the initial polarization of each coherent beam is in parallel, a half wave plate 3 is placed in the path of the Ar ion laser. An enlarger device in each path 4, 5 increases the beams from a diameter of 0.5 mm to 17 mm. The ray bundles pass through two beamsplitters 6, 7 with 50% of each ray hitting the rotating polygon 8. The other 50% of the rays reflect off mirrors 9, 10 and impinge on the rotating polygon. This effectively results in four beams reflecting off its surface. The lower two correspond to the
0.6328 m radiation while the upper are the blue beams from the Ar laser. Each of the beams passes through a truncated F-r lens assembly 11, 12, respectively, which functions to focus the scanned beam from 17 mm to 0.5 mils on the target surface 13. The Ar laser...