Browse Prior Art Database

Self-Centering Device Mask Alignment Fixture

IP.com Disclosure Number: IPCOM000040590D
Original Publication Date: 1987-Dec-01
Included in the Prior Art Database: 2005-Feb-02
Document File: 2 page(s) / 50K

Publishing Venue

IBM

Related People

Antonie, CH: AUTHOR [+3]

Abstract

This article describes an improved device mask alignment fixture which can be used for precise alignment of substrates during metal evaporation processes. The fixture uses opposing identical spring-plates to body-center substrates with loose dimensional tolerance. This provides for faster and more precise mask alignment processes. (Image Omitted) Referring to Fig. 1, spring-plate 10 is comprised of cantilevered spring arms 12 having flat faces 14. A pair of these plates 10 are used together, with one plate rotated 180 degrees with respect to the other. Fig. 2 shows two plates 10 in the open position. Substrate 16 is clamped when the two plates 10 are slid in opposite directions. Fig. 3 illustrates the substrate 16 in its clamped position.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 2

Self-Centering Device Mask Alignment Fixture

This article describes an improved device mask alignment fixture which can be used for precise alignment of substrates during metal evaporation processes. The fixture uses opposing identical spring-plates to body-center substrates with loose dimensional tolerance. This provides for faster and more precise mask alignment processes.

(Image Omitted)

Referring to Fig. 1, spring-plate 10 is comprised of cantilevered spring arms 12 having flat faces 14. A pair of these plates 10 are used together, with one plate rotated 180 degrees with respect to the other. Fig. 2 shows two plates 10 in the open position. Substrate 16 is clamped when the two plates 10 are slid in opposite directions. Fig. 3 illustrates the substrate 16 in its clamped position. The four large holes 18 allow assembly bolts (not shown) to pass through and still provide proper alignment. The small holes 20 and grooves 22 allow an external mechanism to apply the linear translation for the body- centered clamping force. While only one substrate location is presented in the figures, in practice the masks would have several hundred locations for substrates in a periodic array.

1

Page 2 of 2

2

[This page contains 4 pictures or other non-text objects]