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In-Situ Electroless Bath Take/Rate Monitor

IP.com Disclosure Number: IPCOM000040632D
Original Publication Date: 1987-Dec-01
Included in the Prior Art Database: 2005-Feb-02
Document File: 2 page(s) / 29K

Publishing Venue

IBM

Related People

Galasco, RT: AUTHOR [+2]

Abstract

Electroless plating bath deposition rates are vital in determining the plating time required to achieve a particular deposit thickness. The "take" time or the time required for the initiation of plating is also critical because it may vary depending on surface conditions and the seeding process conditions. Measuring techniques which depend on weight gain do not measure "take" and are not adaptable to in-situ monitoring. A test vehicle having exposed laminate in its central portion and copper at each end provides an accurate in-situ monitor of "take" and plating bath deposition rates.

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In-Situ Electroless Bath Take/Rate Monitor

Electroless plating bath deposition rates are vital in determining the plating time required to achieve a particular deposit thickness. The "take" time or the time required for the initiation of plating is also critical because it may vary depending on surface conditions and the seeding process conditions. Measuring techniques which depend on weight gain do not measure "take" and are not adaptable to in-situ monitoring. A test vehicle having exposed laminate in its central portion and copper at each end provides an accurate in-situ monitor of "take" and plating bath deposition rates.

The technique is described in the following. The test vehicle is constructed from the same type of laminate to be used in the electroless plating bath. The vehicle (Fig. 1) consists of an exposed laminate surface 1, eight inches in length, and one inch of exposed 1 ounce copper tabs 2 on each end. The width of the vehicle is two inches. Electrical connections 3 are made from an impedance meter (not shown) to each end of the copper tabs 2. A high frequency AC electrical signal is applied between the copper tabs 2. The magnitude of signal allows measurement of impedance, resistance, or capacitance of the region between the tabs. No perturbation of chemical processes occurs as a result of measurement because chemical kinetics are too slow to respond to a very high frequency signal.

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When the vehicle is initially submerged in the...