Browse Prior Art Database

Microetch Solution for Aluminum

IP.com Disclosure Number: IPCOM000040802D
Original Publication Date: 1987-Jan-01
Included in the Prior Art Database: 2005-Feb-02
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

DiCenzo, RA: AUTHOR

Abstract

A solution and process for microetching a high reflectivity aluminum surface to uniformly dull the surface.

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This is the abbreviated version, containing approximately 100% of the total text.

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Microetch Solution for Aluminum

A solution and process for microetching a high reflectivity aluminum surface to uniformly dull the surface.

An aqueous ferric chloride solution of about 50 percent is employed at room temperature to etch high reflectivity aluminum surfaces, giving a finely grained dull surface. Heating the solution to about 125 degrees Fahrenheit gives a slightly finer grained etch, but care must be exercised due to the rapid etch rate at elevated temperatures.

An exemplary process comprises: 1. Pre-clean and degrease in mild alkaline electric cleaner. 2. D.I. water rinse. 3. Pre-etch in 25 percent sodium hydroxide solution for 30 seconds to 1 minute. 4. D.I. water rinse. 5. Etch in 50 percent ferric chloride solution for 30 seconds to 1 minute. 6. D.I. rinse. 7. Desmut and final etch in solution of: 750 ml/l Nitric Acid (Reagent Grade) 1-2 minutes 120 g/1 Ammonium Bifluoride (R.G.) 8. D.I. Rinse.

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