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Generation of Undercut Profiles in Ablative Photodecomposition of Polymers

IP.com Disclosure Number: IPCOM000040805D
Original Publication Date: 1987-Jan-01
Included in the Prior Art Database: 2005-Feb-02
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Braren, EB: AUTHOR [+3]

Abstract

Etching of polymer surfaces by ablative photodecomposition always gives an overcut cross-sectional profile, the angle from the vertical varying from 2 - 28o (Fig. 1). The same results are obtained whether contact masking or projection printing is employed. It does not depend on a diverging or converging beam.

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Generation of Undercut Profiles in Ablative Photodecomposition of Polymers

Etching of polymer surfaces by ablative photodecomposition always gives an overcut cross-sectional profile, the angle from the vertical varying from 2 - 28o (Fig. 1). The same results are obtained whether contact masking or projection printing is employed. It does not depend on a diverging or converging beam.

For some patterning applications, using contact metal masks, it is desirable to have an undercut cross-sectional profile with an angle of 5 - 15o . This can be achieved by placing the work (polymer 10 and mask 12) at the required angle to the laser beam 14 (Fig. 2). Circular symmetry in the etched pattern is obtained by rotating the work around its own axis by means of an electric motor 16. The angle of the undercut depends on the angle a at which the sample rotates. The sample in Fig. 3 was rotated at 45o and has an undercut angle of 36o . It is possible to obtain undercut angles as large as needed merely by adjusting the angle between the laser beam and the axis of rotation.

Disclosed anonymously

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