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Etchant for Molybdenum

IP.com Disclosure Number: IPCOM000040817D
Original Publication Date: 1987-Jan-01
Included in the Prior Art Database: 2005-Feb-02
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Beckerman, M: AUTHOR [+3]

Abstract

The following formulation serves as an etchant for thin molybdenum films coated with developed positive photoresist: Sodium Carbonate 75 grams/liter Potassium ferrocyanide 40 grams/liter Wetting agent optional Temperature 20-30o C pH 11.5-12.5

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Etchant for Molybdenum

The following formulation serves as an etchant for thin molybdenum films coated with developed positive photoresist: Sodium Carbonate 75 grams/liter Potassium ferrocyanide 40 grams/liter Wetting agent optional Temperature 20-30o C pH 11.5-12.5

Metal removal is at a rate of approximately 2000Ao/min. above a pH of 12.0 and is controlled primarily by the sodium carbonate concentration and temperature.

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