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Self-Sealing, Free Theta Rotation Vacuum Chuck/Pedestal

IP.com Disclosure Number: IPCOM000041023D
Original Publication Date: 1987-May-01
Included in the Prior Art Database: 2005-Feb-02
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Baker, DE: AUTHOR [+3]

Abstract

The self-sealing, free theta rotation vacuum chuck/pedestal shown in cross-section in the figure provides a novel means for supporting semiconductor wafers. The chuck/pedestal provides a continuous vacuum to hold a wafer in place, yet allows a full 360 degrees rotation with only two parts.

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Self-Sealing, Free Theta Rotation Vacuum Chuck/Pedestal

The self-sealing, free theta rotation vacuum chuck/pedestal shown in cross- section in the figure provides a novel means for supporting semiconductor wafers. The chuck/pedestal provides a continuous vacuum to hold a wafer in place, yet allows a full 360 degrees rotation with only two parts.

Referring to the figure, the vacuum chuck/pedestal includes two main parts, a polycarbonate pedestal 10 and an aluminum vacuum chuck 14. Pedestal 10 supports the chuck 14 and provides a smooth bearing surface for the rotation of shaft 12. Vacuum port 16 supplies the chuck surface 18 with vacuum through the center shaft port 20. Center shaft port 20 supplies all vacuum rings 22 with a continuous vacuum. The pedestal vacuum port 16 not only provides a supply vacuum to the chuck surface, but also holds the chuck shaft bottom 24 sealed to the pedestal 10 thereby eliminating any vacuum leakage. The chuck surface 18 can have a wedge shaped cutout to facilitate wafer handling with a vacuum pencil.

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Disclosed anonymously

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