Browse Prior Art Database

Wafer Boat Improved Through Use of Spring Arm

IP.com Disclosure Number: IPCOM000041060D
Original Publication Date: 1987-Jun-01
Included in the Prior Art Database: 2005-Feb-02
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Schantz, HG: AUTHOR

Abstract

This article describes an improvement to a wafer boat which reduces the incidence of damage to the edges of semiconductor wafers. The improvement comprises the addition of a spring loaded arm which secures the wafers in the wafer boat thereby preventing any shaking or rattling during transport.

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Wafer Boat Improved Through Use of Spring Arm

This article describes an improvement to a wafer boat which reduces the incidence of damage to the edges of semiconductor wafers. The improvement comprises the addition of a spring loaded arm which secures the wafers in the wafer boat thereby preventing any shaking or rattling during transport.

Referring to Fig. 1, a wafer boat 10 with wafer 12 is shown schematically. Spring arm 14 is mounted on the side of wafer boat 10 and is spring loaded to exert a gentle force on wafer 12 as desired. Fig. 2 shows the spring arm by itself. Spring loaded hinge 16 is located near the bottom of the spring arm 14 and a hole 18 for a locking pin is shown. If desired, a pin can be inserted in the hole to keep the spring arm open to allow easy transfer of wafers into and out of the wafer boat.

The spring arm 14 can also have a slot for further securing the wafers. In alternative embodiments, one arm can be used to secure all the wafers in a boat.

Disclosed anonymously.

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