Browse Prior Art Database

Thin Film Processing Boat Substrate Holder

IP.com Disclosure Number: IPCOM000041094D
Original Publication Date: 1987-Jul-01
Included in the Prior Art Database: 2005-Feb-02
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Bezosky, JJ: AUTHOR [+3]

Abstract

The substrates used in thin film processing are transported and stored in a bottomless boat that holds a plurality of the substrates on edge. Less contamination of the substrates will occur if the substrate boats are supported in a holder at the work station that mounts the substrates above the work station at an angle to the work station surface to allow air to circulate past the substrates.

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Thin Film Processing Boat Substrate Holder

The substrates used in thin film processing are transported and stored in a bottomless boat that holds a plurality of the substrates on edge. Less contamination of the substrates will occur if the substrate boats are supported in a holder at the work station that mounts the substrates above the work station at an angle to the work station surface to allow air to circulate past the substrates.

The fixture can comprise a base with brackets to support the boat mounted to the base at an acute angle. The brackets are appropriately formed to support the substrates and the substrate boat at the angle. The substrates are supported in the bottomless boat holder on an edge. Thus, with the boat supported in the fixture at an angle and above the work surface, air in the clean room can flow past the surfaces of the substrates to remove airborne contaminates.

The fixture also allows the access of product substrates from the side. In this fashion, contamination is minimized since substrates can be removed from the substrate boat without the operators reaching over the substrates.

Disclosed anonymously.

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