Browse Prior Art Database

Protective Polymer Coating for Ion Milled Air Bearing

IP.com Disclosure Number: IPCOM000041130D
Original Publication Date: 1987-Sep-01
Included in the Prior Art Database: 2005-Feb-02
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Chicotka, SK: AUTHOR [+4]

Abstract

A method is described for protecting conductor surfaces of an air bearing slider during an ion milling operation by depositing a strippable polymer coating along the edge of the slider row.

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Protective Polymer Coating for Ion Milled Air Bearing

A method is described for protecting conductor surfaces of an air bearing slider during an ion milling operation by depositing a strippable polymer coating along the edge of the slider row.

A polymer coating is applied directly over the conductive stud surface edge prior to bonding the slider row onto the carrier. This coating then protects the row edge from resputtered deposits such as stainless steel, for example, during the ion milling operation. During subsequent operations, the polymer coating is dissolved away thereby removing any resputtered deposits with it.

The choice of a suitable polymer material requires that the chosen material not be soluble in the process chemicals used prior to the ion milling step, and that it be capable of being removed after the ion milling operation by solvents which do not attack other components of the slider structure. One suitable material is poly(dimethylglutarimide) (PMGI). Other examples of polymers suitable for this application include novolak based resins, methacrylates, and polyimide.

Disclosed anonymously.

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