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Etching of Titanium

IP.com Disclosure Number: IPCOM000041138D
Original Publication Date: 1987-Sep-01
Included in the Prior Art Database: 2005-Feb-02
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Missel, L: AUTHOR

Abstract

A solution for etching titanium contains small amounts of nitric acid or ammonium hydroxide in 30% hydrogen peroxide. Typical examples of these etching solutions are:

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Etching of Titanium

A solution for etching titanium contains small amounts of nitric acid or ammonium hydroxide in 30% hydrogen peroxide. Typical examples of these etching solutions are:

_____Example #1________ _____Example #2________

30% H2O2 750 ml 30% H2O 500 ml

28% NH3 25 ml 70% HNO3 5 ml

H2O 225 ml H2O 495 ml The etching solution in Example #1 removed 100A~ Ti in 90 seconds with no attack on silicon dioxide or permalloy detectable after two hours immersion. The etching solution in Example #2 removed 100A~ in 90 seconds with no attack on AlCu or silicon dioxide. Permalloy was pitted with this solution.

Disclosed anonymously.

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