Browse Prior Art Database

Pickup Tabs And Horizontal Detents for Wafer Carriers

IP.com Disclosure Number: IPCOM000041157D
Original Publication Date: 1987-Oct-01
Included in the Prior Art Database: 2005-Feb-02
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Mulligan, JM: AUTHOR [+2]

Abstract

Improvements to semiconductor wafer carriers can facilitate their handling both manually and automatically, as well as to provide a reduction in tolerance accumulations.

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This is the abbreviated version, containing approximately 100% of the total text.

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Pickup Tabs And Horizontal Detents for Wafer Carriers

Improvements to semiconductor wafer carriers can facilitate their handling both manually and automatically, as well as to provide a reduction in tolerance accumulations.

The first modification to the wafer carrier 1 would be to add pickup tabs 2 on both ends of the carrier plus the addition of pickup tabs 3 on both sides of the carrier. By extending the tab details to both side walls as well as the end and H- bar ends, pickup is provided from any of the four surfaces. The dimensional details are identical so the same handling mechanism may be utilized. This method is especially suited to automatic operations.

The second method works to avoid the effects of deformation of plastic carriers. This causes differences in the wafer datum line when used with automatic handling methods. The tolerances on commercial wafer carriers are excessive due to accumulated tolerances and flexing of the carrier because the datum line is taken from the lower part of the carrier.

The proposal suggests that a locating detent 4 be placed on both sides of the carrier 1 at the 13th slot 5 of the 25-slot carrier. As an alternative, a reference pin 6 may be used. The relocating of the datum point in this manner means the tolerance accumulation will be significantly lessened.

Disclosed anonymously.

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