Browse Prior Art Database

Probe Planarization Tool

IP.com Disclosure Number: IPCOM000041214D
Original Publication Date: 1987-Dec-01
Included in the Prior Art Database: 2005-Feb-02
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Humphrey, ML: AUTHOR [+2]

Abstract

A tool is described for planarizing contacts of a probe card. A conductive plane is moved vertically to contact probes on the card. A display of probes contacted by the conductive plane at any vertical height of the conductive plane indicates adjustments required to bring all probe contacts within an acceptable range of planarity.

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Probe Planarization Tool

A tool is described for planarizing contacts of a probe card. A conductive plane is moved vertically to contact probes on the card. A display of probes contacted by the conductive plane at any vertical height of the conductive plane indicates adjustments required to bring all probe contacts within an acceptable range of planarity.

As shown in the figure, a probe card 2, comprised of a radial array of contact probes 4, is mounted in a motherboard 6. Each of the contact probes 4 is connected through the motherboard 6 to a connector 8 and wiring within cable 10 to a display panel 12 (not shown). When grounded conductive chuck 14 is moved vertically upward by means of a micrometer 16, the lower contact probes 4 make connection to grounded conductive flat chuck 14 first and their contact is indicated on display panel 12. These lowest contact probes are manually adjusted upward and conductive chuck 14 is again moved upward to detect which probes now require adjustment to bring all probes into contact with the conductive chuck 14 within a predetermined acceptable range of height of chuck
14.

The motherboard 6 is supported on its edges by a rail support system 22 attached to baseplate 24. Cable 10 is mounted to support plate 20 in the manner shown to assure that there is no vertical force applied to connector 8 by the cable 10, thus assuring that the motherboard 6 is not distorted by the weight of cable 10 during the planarizing operation.

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