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Browse Prior Art Database

Flow Limiter for Silane and Other Hazardous Gases

IP.com Disclosure Number: IPCOM000041289D
Original Publication Date: 1984-Jan-01
Included in the Prior Art Database: 2005-Feb-02
Document File: 2 page(s) / 42K

Publishing Venue

IBM

Related People

Fatula, JJ: AUTHOR

Abstract

Gas suppliers will generally not provide a gas tank containing a hazardous gas, such as silane, with a built-in flow limiter because they will have great difficulty filling and purging the tank. A vendor installable/removable flow limiter is needed which will allow its removal for tank filling/purging and installation just prior to shipment. Alternatively, the user could install such a fitting at receipt of tanks and remove it prior to return shipment. The means of installing, removing, and using a flow limiter on such a gas tank may be better understood with reference to the figure. There is shown a pressurized gas tank 10 having a gas flow passageway 11 in top fitting 12 of the tank 10. The tank valve 13 has a handle 14 which regulates gas flow to output port 15.

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Flow Limiter for Silane and Other Hazardous Gases

Gas suppliers will generally not provide a gas tank containing a hazardous gas, such as silane, with a built-in flow limiter because they will have great difficulty filling and purging the tank. A vendor installable/removable flow limiter is needed which will allow its removal for tank filling/purging and installation just prior to shipment. Alternatively, the user could install such a fitting at receipt of tanks and remove it prior to return shipment. The means of installing, removing, and using a flow limiter on such a gas tank may be better understood with reference to the figure. There is shown a pressurized gas tank 10 having a gas flow passageway 11 in top fitting 12 of the tank 10. The tank valve 13 has a handle 14 which regulates gas flow to output port 15. A flow limiter 16 having external threads is inserted into an inside threaded opening in output port 15. The flow limiter 16 has sintered stainless steel frit 17 which acts to limit flow of the gas. The flow limiter 16 does not effect the usual coupling 18 to the tank valve 13.

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