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Browse Prior Art Database

Bar Code for Measuring Targets

IP.com Disclosure Number: IPCOM000041291D
Original Publication Date: 1984-Jan-01
Included in the Prior Art Database: 2005-Feb-02
Document File: 2 page(s) / 37K

Publishing Venue

IBM

Related People

Hsia, LC: AUTHOR [+2]

Abstract

This bar coding scheme will eliminate any misinterpretation of the measurement results. Thus, it will eliminate human error in this capacity. It greatly facilitates automatic data processing. It makes it possible to establish a reliable data base. For both overlay inspection and calculation of overlay compensation for automatic alignment, correct axis information about measurement orientation with respect to the design and lithographic tool coordinate is absolutely essential. Human errors or change of nomenclature or conventions often render the measurements and analysis invalid. Although bar codes can serve as an orientation discriminator, their real power lies in facilitating automatic data processing when a laser scanning measurement machine, such as Nikon 2I, is used.

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Bar Code for Measuring Targets

This bar coding scheme will eliminate any misinterpretation of the measurement results. Thus, it will eliminate human error in this capacity. It greatly facilitates automatic data processing. It makes it possible to establish a reliable data base. For both overlay inspection and calculation of overlay compensation for automatic alignment, correct axis information about measurement orientation with respect to the design and lithographic tool coordinate is absolutely essential. Human errors or change of nomenclature or conventions often render the measurements and analysis invalid. Although bar codes can serve as an orientation discriminator, their real power lies in facilitating automatic data processing when a laser scanning measurement machine, such as Nikon 2I, is used. Bar coding is a scheme that can find many applications whenever a two- dimensional orientation discriminator is needed. It is extremely useful in VLSI technology because all the devices and tools carry X, Y, two-dimensional information. The bar coding design requires four bars be placed on each side of the measurement target at different distances. The figure clearly demonstrates the bar coding design implemented in a box pattern used on some masks. Four bars are placed along the four sides of the box at different distances as indicated in the figure by numbers 5, 7, 9, and 11, respectively. These are not hard numbers but should be different from one another and no...