Browse Prior Art Database

Mounting of Mask With Pellicle

IP.com Disclosure Number: IPCOM000041292D
Original Publication Date: 1984-Jan-01
Included in the Prior Art Database: 2005-Feb-02
Document File: 2 page(s) / 51K

Publishing Venue

IBM

Related People

Patel, AB: AUTHOR [+2]

Abstract

Means for mounting a mask with a pellicle in Perkin Elmer Model 100 and 200 photo aligners are disclosed. Pellicles have been found useful for protecting photolithographic masks [*]. However, because of the resulting increased effective thickness of the mask, there was a high incidence of pellicle damage during the loading an unloading of the combination of mask and pellicle. Fig. 1 is a cross-sectional view of a mask holder and its mounting in several different Perkin-Elmer photo aligners. The mask mount 1 is mounted to a carriage arm 2 by a flexible stage 3. A mask clamp holder 4 is held in the mount 1, and the mask 5 is held in the mask clamp holder 4. In operation, the mask 5 in its flexible mounting is held against a mask reference ring 6 by vacuum.

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Mounting of Mask With Pellicle

Means for mounting a mask with a pellicle in Perkin Elmer Model 100 and 200 photo aligners are disclosed. Pellicles have been found useful for protecting photolithographic masks [*]. However, because of the resulting increased effective thickness of the mask, there was a high incidence of pellicle damage during the loading an unloading of the combination of mask and pellicle. Fig. 1 is a cross-sectional view of a mask holder and its mounting in several different Perkin-Elmer photo aligners. The mask mount 1 is mounted to a carriage arm 2 by a flexible stage 3. A mask clamp holder 4 is held in the mount 1, and the mask 5 is held in the mask clamp holder 4. In operation, the mask 5 in its flexible mounting is held against a mask reference ring 6 by vacuum. The addition of the pellicle and its support ring to the mask interferes with mounting of the mask in the clamp holder and with the motion of the mask 5 against the mask reference ring 6. The mask clamp holder 4, as shown in Fig. 2, was modified by decreasing the width of the guide insert 10 and by increasing the width of the clamping roller
11. In Fig. 3, the combination of the mask clamp holder 4, the mask 5 mounted in a protective cartridge 20 with a cover flap 21, a pellicle ring 22 with a pellicle 23 attached to the mask 5 and the mask reference ring 6. The cartridge 20 with its cover flap 21 encloses and protects the mask 5. The diameter of the opening in the mask reference ri...