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Piezoelectric Xy Translator

IP.com Disclosure Number: IPCOM000041701D
Original Publication Date: 1984-Mar-01
Included in the Prior Art Database: 2005-Feb-02
Document File: 2 page(s) / 46K

Publishing Venue

IBM

Related People

Bednorz, JG: AUTHOR [+4]

Abstract

This translator permits displacement of a probe of a scanning device in x and y directions on the order of millimeters but with nanometer accuracy. The translater comprises a support plate 1 having a slot 2, and clamping members 3, 4 and 5 to provide a channel 6 for the gliding elements 7 and 8 of a cross-shaped plate 9. Gliding elements 7 and 8 have a profile fitting a corresponding profile in clamping members 3, 4 and 5. On the face of plate 9 opposite gliding elements 7 and 8, there are like gliding elements 10 and 11 which fit into channel 12 provided by clamping members 13, 14 and 15 attached to a slotted base plate 16 and mounted such that channels 6 and 12 are mutually orthogonal.

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Piezoelectric Xy Translator

This translator permits displacement of a probe of a scanning device in x and y directions on the order of millimeters but with nanometer accuracy. The translater comprises a support plate 1 having a slot 2, and clamping members 3, 4 and 5 to provide a channel 6 for the gliding elements 7 and 8 of a cross-shaped plate 9. Gliding elements 7 and 8 have a profile fitting a corresponding profile in clamping members 3, 4 and 5. On the face of plate 9 opposite gliding elements 7 and 8, there are like gliding elements 10 and 11 which fit into channel 12 provided by clamping members 13, 14 and 15 attached to a slotted base plate 16 and mounted such that channels 6 and 12 are mutually orthogonal. Support plate 1, cross plate 9 and base plate 16 all consist of piezoelectric material and carry appropriate electrodes so as to cause the material and carry appropriate electrodes so as to cause the material to elongate or contract in response to the application of electrical signals. By causing portion 16a of base plate 16 to contract, gliding element 11 will be clamped but gliding element 10 will be free to move along channel 13 as cross plate 9 contracts along the x direction. Subsequent contraction of portion 16b causes gliding element 10 to be clamped. and elongation of cross plate 9 in x direction causes support plate 1 to be moved likewise. The displacement of support plate 1 in the y direction is achieved on the same principle. Slotting cross...