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Silane Flow Restrictor

IP.com Disclosure Number: IPCOM000041826D
Original Publication Date: 1984-Mar-01
Included in the Prior Art Database: 2005-Feb-03
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Larsen, RA: AUTHOR [+3]

Abstract

It has been known that silane (SiH4), a pyrophoric gas used in semiconductor manufacturing, can under some conditions cause a severe explosion. However, it has now been found that adequate dilution of silane at a leak site prevents formation of explosive mixtures. This can be achieved by a combination of a simple flow-restricting device, that is, an orifice in the delivery line which limits the potential delivery of silane downstream, and a high volume airflow environment. In particular, limiting the flow of 100% silane to less than 40 liters per minute, into an unbaffled airflow of 500 cubic feet per minute, assures sufficient dilution of silane and eliminates the explosion hazard. In particular, for cylinder pressure up to 750 psig, it has been found that installing a 0.

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Silane Flow Restrictor

It has been known that silane (SiH4), a pyrophoric gas used in semiconductor manufacturing, can under some conditions cause a severe explosion. However, it has now been found that adequate dilution of silane at a leak site prevents formation of explosive mixtures. This can be achieved by a combination of a simple flow-restricting device, that is, an orifice in the delivery line which limits the potential delivery of silane downstream, and a high volume airflow environment. In particular, limiting the flow of 100% silane to less than 40 liters per minute, into an unbaffled airflow of 500 cubic feet per minute, assures sufficient dilution of silane and eliminates the explosion hazard. In particular, for cylinder pressure up to 750 psig, it has been found that installing a 0.010-inch orifice on the high pressure side of the regulator assembly of the gas delivery hardware is sufficient to limit the flow to less than 40 liters per minute. In the event of even a catastrophic failure of some portion of the gas delivery system downstream of the restrictor, uncontrolled release of the hazardous gas will be limited.

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