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Process for the Fabrication of Narrow-Track Flex-File Recording Heads

IP.com Disclosure Number: IPCOM000041831D
Original Publication Date: 1984-Mar-01
Included in the Prior Art Database: 2005-Feb-03
Document File: 2 page(s) / 29K

Publishing Venue

IBM

Related People

Anderson, RB: AUTHOR [+3]

Abstract

A single operation, chemically enhanced, laser etching process forms the head width on a magnetic transducer head row. The figure shows a head row that may contain 15 or more flexible magnetic file heads. The head row includes a ferrite sandwich formed of ferrite elements 3 separated by a glass gap 4. The head gaps having a width 6 are formed by laser etching away the areas 5. The reactive ion etching process involves generating a pattern with photoresist on a sputter-deposited seed layer, electroplating a metal mask, reactive ion etching the pattern into the ferrite, and removing the metal mask. Using chemically enhanced laser etching, the same process is accomplished in a single operation.

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Process for the Fabrication of Narrow-Track Flex-File Recording Heads

A single operation, chemically enhanced, laser etching process forms the head width on a magnetic transducer head row. The figure shows a head row that may contain 15 or more flexible magnetic file heads. The head row includes a ferrite sandwich formed of ferrite elements 3 separated by a glass gap 4. The head gaps having a width 6 are formed by laser etching away the areas 5. The reactive ion etching process involves generating a pattern with photoresist on a sputter-deposited seed layer, electroplating a metal mask, reactive ion etching the pattern into the ferrite, and removing the metal mask. Using chemically enhanced laser etching, the same process is accomplished in a single operation. A chemically enhanced laser etching tool equipped with a programmable stage and power supply can generate complex patterns and achieve multidepth etching. The pattern generation takes place in a liquid, such as potassium hydroxide, which not only eliminates substrate redeposition, but also reduces stress on the parts by keeping them cool and provides a clean environment so that the heads can be manufactured without the use of a clean room.

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