Browse Prior Art Database

Holder for Automatic Alignment of Large Wafers in a Scanning Electron Microscope

IP.com Disclosure Number: IPCOM000042020D
Original Publication Date: 1984-Mar-01
Included in the Prior Art Database: 2005-Feb-03
Document File: 2 page(s) / 37K

Publishing Venue

IBM

Related People

Aliotta, CF: AUTHOR [+3]

Abstract

A holder for large silicon wafers is described which automatically aligns the wafer with respect to the holder and may be used in a vacuum environment, such as in a Scanning Electron Microscope (SEM). Wafer 10 is held in contact with holder 12 at only three points 14, 16, 18 along the wafer edge. The movable contact pin 20 is springloaded and designed to fit into an alignment slot 22 on one edge of the wafer. This serves two purposes: (1) the slot allows each succeeding wafer to fit on the holder in the same orientation each time (saving operator and SEM setup time) and (2) the spring-loaded feature applies pressure to the remaining stationary hold-down pins 24, 26 (designed with a slight chamfer to prevent the wafer from lifting off). Thus, the wafer is positioned and secured to the holder in one operation.

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Holder for Automatic Alignment of Large Wafers in a Scanning Electron Microscope

A holder for large silicon wafers is described which automatically aligns the wafer with respect to the holder and may be used in a vacuum environment, such as in a Scanning Electron Microscope (SEM). Wafer 10 is held in contact with holder 12 at only three points 14, 16, 18 along the wafer edge. The movable contact pin 20 is springloaded and designed to fit into an alignment slot 22 on one edge of the wafer. This serves two purposes: (1) the slot allows each succeeding wafer to fit on the holder in the same orientation each time (saving operator and SEM setup time) and (2) the spring-loaded feature applies pressure to the remaining stationary hold-down pins 24, 26 (designed with a slight chamfer to prevent the wafer from lifting off). Thus, the wafer is positioned and secured to the holder in one operation. The wafer is brought to and adjusted on the holder with a vacuum pick-up tool (not shown) through a slot 28 cut into the body of the holder. The wafer is also removed from the holder by a vacuum pick-up tool. This ensures contamination-free handling. Among the advantages are: 1. The self aligning feature positions the wafer in the SEM in the same orientation each time the sample is changed. 2. The outer edge hold-down posts allow unobstructed viewing and analysis of the complete wafer surface. 3. One outer edge is held securely by a spring-loaded pressure post to prevent the wafe...