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Rails Defined by Etching

IP.com Disclosure Number: IPCOM000042117D
Original Publication Date: 1984-Mar-01
Included in the Prior Art Database: 2005-Feb-03
Document File: 2 page(s) / 24K

Publishing Venue

IBM

Related People

Deckert, KL: AUTHOR [+2]

Abstract

This article describes a method for producing an air bearing slider with narrow rails by a two-step process comprising a relatively deep relieved section and relatively shallow etched section to define the rail width. In an air bearing slider 1 which includes at least one thin film magnetic element 2, the edge cuts required to produce the rails may interfere with the thin film magnetic element 2. To solve this problem, a relatively deep relieved section 3 is produced which does not interfere with the thin film magnetic element 2. Relatively narrow etched sections 4 are then produced to define the width of the air bearing rails 5. The sections 4 are etched to a relatively shallow depth by reactive ion etching, for example, so that they do not interfere with the thin film magnetic elements 2.

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Rails Defined by Etching

This article describes a method for producing an air bearing slider with narrow rails by a two-step process comprising a relatively deep relieved section and relatively shallow etched section to define the rail width. In an air bearing slider 1 which includes at least one thin film magnetic element 2, the edge cuts required to produce the rails may interfere with the thin film magnetic element 2. To solve this problem, a relatively deep relieved section 3 is produced which does not interfere with the thin film magnetic element 2. Relatively narrow etched sections 4 are then produced to define the width of the air bearing rails 5. The sections 4 are etched to a relatively shallow depth by reactive ion etching, for example, so that they do not interfere with the thin film magnetic elements 2. The drawing shows the trailing end of the slider. Because the relief section 3 remains at ambient pressure when slider 1 is flying, the relatively narrow etch sections 4 also remain at ambient pressure.

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