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Method for using an ampoule in PECVD processing

IP.com Disclosure Number: IPCOM000042245D
Publication Date: 2005-Feb-03
Document File: 4 page(s) / 90K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for using an integrated liquid delivery system (ILDS) equipped with an onboard ampoule in a plasma enhanced chemical vapor deposition (PECVD) tool. Benefits include improved functionality and improved yield.

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Method for using an ampoule in PECVD processing

Disclosed is a method for using an integrated liquid delivery system (ILDS) equipped with an onboard ampoule in a plasma enhanced chemical vapor deposition (PECVD) tool. Benefits include improved functionality and improved yield.

Background

              SiC defects can be generated during processing right after the ampoule is filled. Observation indicates that an increased level of defects occurs in the first 25 wafers processed after ampoule refill.

              Without communication between supply cabinet and onboard ampoule, it s possible to continually fill the ampoule even if the bulk supply cabinet is empty.

              No conventional solution exists for either issue.  For the former, one possibility is the installation of an  filter. However, this filter has previously caused reliability issues.

      Typically, the ampoule is filled to 30% full. As a result, particles can be stirred up during filling and transferred to the process chamber during processing. The particles are contaminants that can make the wafers unusable (see Figure 1).

General description

 

              The disclosed method includes fill logic for the ampoule to reduce the particles that are stirred up and transferred to the process chamber. Additionally, the method prevents the soft shutdown of the tool or the formation of scrap wafers because the bulk cabinet supply is empty.

              The key elements of the disclosed method include:

•             Refilling the ampoule at 80% full or higher and adding a flow restrictor or a liquid flow controller (LFC) to control the flow to the ampoule and, consequently, reduce turbulence in the ampoule

•             Modifying the software to check the bulk cabinet supply after a refill is initiated

Advantages

              The disclosed method provides advantages, including:
•             Improved functionality...