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Browse Prior Art Database

Compressed Y-Dimension Reticle

IP.com Disclosure Number: IPCOM000042247D
Publication Date: 2005-Feb-03
Document File: 3 page(s) / 327K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method that uses the relative speed of the reticle and wafer stages to maximize the field size and compensate for the compressed y-dimensions on the reticle. Benefits include increasing throughput time.

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Compressed Y-Dimension Reticle

Disclosed is a method that uses the relative speed of the reticle and wafer stages to maximize the field size and compensate for the compressed y-dimensions on the reticle. Benefits include increasing throughput time.

Background

Conventional reticle designs require a 4x reduction in both the x and y dimensions. The conventional lithography Step and Scan technology requires the following components:

§         A reticle that has a field size 4x larger than the desired field size printed on a wafer

§         Features on the reticle that are 4x larger than features printed on a wafer

§         A reticle stage that can scan at a speed of 4V (nominally in the Y direction)

§         A wafer stage that can scan at a speed of V (nominally in the Y direction)

§         Optical components (i.e. lens columns) that provide a 4x reduction in the pattern from reticle to wafer

§         An illumination source (i.e. a laser), and delivery of the light energy to the reticle through the lens column to the resist coated wafer

§         Software and hardware controls detailing the printed field size as one quarter the reticle field size

General Description

The disclosed method uses the relative speed of the reticle and wafer stages to maximize the field size and compensate for the compressed y-dimensions on the reticle; compressed y reticles require a 4x reduction in the x dimension, but only a 2x dimension reduction in y dimension (see Figures 1 and 2). The disclosed method differs from the current state of the art as follows:

§         The reticle has a field size 4x larger than the desired...