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Packaging of Post-CMP Clean Brush to Increase Brush Shelf Life

IP.com Disclosure Number: IPCOM000042261D
Publication Date: 2005-Feb-03
Document File: 2 page(s) / 355K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method to increase brush shelf life by including an inert gas environment inside the brush package that protects the brush from direct exposure to oxygen. Benefits include reducing the loss of nitrogen out of the package.

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Packaging of Post-CMP Clean Brush to Increase Brush Shelf Life

Disclosed is a method to increase brush shelf life by including an inert gas environment inside the brush package that protects the brush from direct exposure to oxygen. Benefits include reducing the loss of nitrogen out of the package.

Background

Currently, the brush package is comprised of either polyethylene, or a double layer of polyethylene/nylon for the external package, and one layer of polyethylene film as the internal package. In some cases, there is no internal package. The objective of the brush packaging is to provide antibacterial protection, either via brush storage in an antibacterial solution or by maintaining an oxygen-free environment inside the package. The former approach has disadvantages because direct exposure of the brush to an antibacterial solution changes the brush’s properties (see Figure 1a). Calculations on the latter indicate that storage at the temperature of 50oC for two years causes a 12 to 20 percent loss of nitrogen (replaced by oxygen).  When in contact with oxygen, bacteria grows on the brush. Since the brush is in direct contact with the wafers, it can cause bacteria-related defects on the wafers.

General Description

The disclosed method drastically reduces the gas exchange between the internal bag and the outside environment (see Figure 1) that leads to an oxygen environment inside the packaging. A co-laminated film, such as a polyethylene film, is used as an impermeable barrier to protect the brush from contact with oxygen (Figure 2). The following are the steps for making the disclosed method:

§         Co-lamina...