Browse Prior Art Database

Method for Cleaning an Electrostatic Chuck

IP.com Disclosure Number: IPCOM000042262D
Publication Date: 2005-Feb-03
Document File: 2 page(s) / 91K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method that uses a sticky polymer to clean the surface of an electrostatic chuck (ESC). Benefits include a solution that enables in-situ cleaning inside exposure tools, without detaching the ESC.

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Method for Cleaning an Electrostatic Chuck

Disclosed is a method that uses a sticky polymer to clean the surface of an electrostatic chuck (ESC). Benefits include a solution that enables in-situ cleaning inside exposure tools, without detaching the ESC.

Background

There is a need to quickly and efficiently remove the particles that accumulate between the ESC and the EUV mask backside coating. Particles between the ESC and the EUV mask may deteriorate the flatness of mask patterns, leading to poorĀ  lithography performance. Currently, to remove these particles, one must detach the ESC from the exposure tool, then clean it outside of the exposure tool.

General Description

The disclosed method applies a sheet as a cleaning device for the ESC surface (see Figure 1). As shown in Figure 2, the cleaning sheet is composed of a liner sheet and a sticky polymer. This sheet is pressed onto the ESC surface using a pressure device. During the pressure operation, the particles on the ESC surface are captured by the sticky polymer and removed when the cleaning sheet is peeled off the ESC surface (see Figure 3).

Advantages

The disclosed method enables in-situ cleaning inside the exposure tools without detaching
the ESC.

Fig. 1

Fig. 2

Fig. 3

Disclosed anonymously