Browse Prior Art Database

Amorphous/Polycrystalline Diamond Film Deposition

IP.com Disclosure Number: IPCOM000042527D
Original Publication Date: 1984-May-01
Included in the Prior Art Database: 2005-Feb-04
Document File: 2 page(s) / 41K

Publishing Venue

IBM

Related People

Green, DC: AUTHOR [+5]

Abstract

Polycrystalline or amorphous diamond films have advantageous physical and chemical properties, including extreme hardness, chemical inertness, and superior insulating/dielectric behavior. Most attempts at preparing such films have used either carbon ion beam deposition or hydrocarbon plasma decomposition methods. Amorphous diamond, however, has not found use as an electronic material, because these deposition methods do not produce the highest degree of fourfold coordinated carbon (plasma techniques) or are impractical as a deposition method for the rapid, large-area deposition of films (ion beams). To solve these problems, a new method of preparing amorphous diamond (a-diamond) is described. Amorphous diamond is produced through the generation and reaction of methylene species having C-X bonds, where X=H, F, Cl, Br, I.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 59% of the total text.

Page 1 of 2

Amorphous/Polycrystalline Diamond Film Deposition

Polycrystalline or amorphous diamond films have advantageous physical and chemical properties, including extreme hardness, chemical inertness, and superior insulating/dielectric behavior. Most attempts at preparing such films have used either carbon ion beam deposition or hydrocarbon plasma decomposition methods. Amorphous diamond, however, has not found use as an electronic material, because these deposition methods do not produce the highest degree of fourfold coordinated carbon (plasma techniques) or are impractical as a deposition method for the rapid, large-area deposition of films (ion beams). To solve these problems, a new method of preparing amorphous diamond (a-diamond) is described. Amorphous diamond is produced through the generation and reaction of methylene species having C-X bonds, where X=H, F, Cl, Br, I. A representation of the generalized polymerization process is shown in the following example:

(Image Omitted)

Facile crosslinking can be achieved by maintaining a relatively high substrate temperature (RT < TS < 500OEC) during deposition, but not so high that graphitization occurs. Also, crosslinking is facilitated by using a mixture of carbene (methylene) precursors such that the reaction is driven by the formation of a stable gaseous molecule (other than H2):

(Image Omitted)

There are many methods of generating the methylenes. For example,

(Image Omitted)

Many more methods are known and easily ap...