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Dense Plating (Of Rhodium) Into a Deep and Narrow Cavity

IP.com Disclosure Number: IPCOM000042752D
Original Publication Date: 1984-Jun-01
Included in the Prior Art Database: 2005-Feb-04
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Calbert, E: AUTHOR [+2]

Abstract

A method is described for electroplating into a deep and narrow cavity by simultaneous pulse plating and ultrasonic agitation. The method comprises cleaning the part to be plated in the presence of ultrasonic agitation, etching the part in a suitable solution, such as a solution of 10% by weight KOH in water when molybdenum metallurgy is used, for example, and repeating the cleaning step. This part of the operation prepares the cavity for plating. The cavity may be, for example, .0005 wide by .003 long by .004 deep, and an application may require plating of a material, such as rhodium, to fill the cavity. The plating is accomplished by the use of a 5 gm/liter rhodium solution at 60ŒC and ultrasonic agitation at 40 KHz, for example. The duty cycle for the plating was 0.4 second on and 0.8 second off.

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Dense Plating (Of Rhodium) Into a Deep and Narrow Cavity

A method is described for electroplating into a deep and narrow cavity by simultaneous pulse plating and ultrasonic agitation. The method comprises cleaning the part to be plated in the presence of ultrasonic agitation, etching the part in a suitable solution, such as a solution of 10% by weight KOH in water when molybdenum metallurgy is used, for example, and repeating the cleaning step. This part of the operation prepares the cavity for plating. The cavity may be, for example, .0005 wide by .003 long by .004 deep, and an application may require plating of a material, such as rhodium, to fill the cavity. The plating is accomplished by the use of a 5 gm/liter rhodium solution at 60OEC and ultrasonic agitation at 40 KHz, for example. The duty cycle for the plating was 0.4 second on and 0.8 second off. The average current was 2400 amperes per foot squared (APF). With these conditions, the cavity was completely filled with solid rhodium.

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