Browse Prior Art Database

Extreme High Temperature Graphite Vacuum Chuck

IP.com Disclosure Number: IPCOM000042853D
Original Publication Date: 1984-Jun-01
Included in the Prior Art Database: 2005-Feb-04
Document File: 2 page(s) / 84K

Publishing Venue

IBM

Related People

Heuslein, FJ: AUTHOR [+2]

Abstract

In the semiconductor industry it is often necessary that glass and quartz materials in the form of tubing be closed at one end with a plate. Because of the high temperatures involved, it is extremely difficult to maintain the plate in a rigid, fixed position on the tube end since it is necessary that both the tube and the plate rotate while being sealed together. The present invention is particularly directed toward a unique vacuum chuck for holding a flat disc of quartz 10, in a glass lathe 11, such that it can be precisely positioned with respect to the end of a tube 12 onto which it is to be sealed. The chuck comprises a graphite head 13 having a plurality of holes (not shown) spaced 120Πapart in the face thereof.

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Extreme High Temperature Graphite Vacuum Chuck

In the semiconductor industry it is often necessary that glass and quartz materials in the form of tubing be closed at one end with a plate. Because of the high temperatures involved, it is extremely difficult to maintain the plate in a rigid, fixed position on the tube end since it is necessary that both the tube and the plate rotate while being sealed together. The present invention is particularly directed toward a unique vacuum chuck for holding a flat disc of quartz 10, in a glass lathe 11, such that it can be precisely positioned with respect to the end of a tube 12 onto which it is to be sealed. The chuck comprises a graphite head 13 having a plurality of holes (not shown) spaced 120OE apart in the face thereof. These holes are drilled such that they all interconnect flanged, stainless steel pipe 14 suitably mounted on the back side of the graphite head 13. This pipe 14 is mounted into one end of the glass lathe 11 and connected to a vacuum source
15. The glass tube 12 to which the plate 10 is to be sealed is held the other end of the glass lathe. In use, the glass plate 10 is held on the face of the chuck by a vacuum drawn in the holes by the vacuum source 15 through the stainless steel pipe 14. This holds the glass plate 10 firmly on the front of the graphite head 13. The plate 10 is aligned on the head so as to mate exactly with the tubing 12 held in the opposite chuck of the glass lathe. The plate 10 and t...