Dismiss
InnovationQ will be updated on Sunday, Oct. 22, from 10am ET - noon. You may experience brief service interruptions during that time.
Browse Prior Art Database

Wafer Seal

IP.com Disclosure Number: IPCOM000042922D
Original Publication Date: 1984-Jun-01
Included in the Prior Art Database: 2005-Feb-04
Document File: 2 page(s) / 48K

Publishing Venue

IBM

Related People

Berry, WS: AUTHOR

Abstract

A tool for hermetically sealing the outer edge of a circular wafer that allows the full exposure of one side of a wafer for a variety of processing steps, such as etching, anodizing, etc., while protecting the other side without the need of a masking layer. This tool is made of a synthetic rubber tubing, having typically 3/8-inch diameter and 1/16-inch thickness, and the material is selected to be resistant to oxidation in the presence of oxidizing acids. The tubing is cut to a length that will be sufficient to provide a close fit around the perimeter of the wafer and is glued to a "doughnut"-like structure with a quick-setting adhesive. A retaining ring (made of a metal or plastic) is used on the outside of this doughnut-like tool to improve its sealing when used in a fixture such as that shown in the figure.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 90% of the total text.

Page 1 of 2

Wafer Seal

A tool for hermetically sealing the outer edge of a circular wafer that allows the full exposure of one side of a wafer for a variety of processing steps, such as etching, anodizing, etc., while protecting the other side without the need of a masking layer. This tool is made of a synthetic rubber tubing, having typically 3/8- inch diameter and 1/16-inch thickness, and the material is selected to be resistant to oxidation in the presence of oxidizing acids. The tubing is cut to a length that will be sufficient to provide a close fit around the perimeter of the wafer and is glued to a "doughnut"-like structure with a quick-setting adhesive. A retaining ring (made of a metal or plastic) is used on the outside of this doughnut- like tool to improve its sealing when used in a fixture such as that shown in the figure. The figure shows the use of this doughnut-like seal in anodizing/ etching equipment. It includes seal 10 with a retaining ring 12 around wafer 14 having a notch filler 16. Underneath the wafer there are spring clips 18 for an electrical contact between the back side of the wafer and a base plate 20. This base plate 20 is made of metal for applications requiring an electrical contact with the back side of the wafer; for other applications it may be made of a plastic material. Over the wafer is a cup 22 (typically from a PVC-like material) which is compressing the doughnut-like seal 10 with wing-nuts 24, to hermetically seal the wafer. Thus, any...