Browse Prior Art Database

Critical Alignment for Front to Back Photomask Alignment

IP.com Disclosure Number: IPCOM000043238D
Original Publication Date: 1984-Aug-01
Included in the Prior Art Database: 2005-Feb-04
Document File: 2 page(s) / 47K

Publishing Venue

IBM

Related People

Lahey, GL: AUTHOR [+4]

Abstract

The drawing shows the frame to artwork registration system comprising a base plate 21 assembled over an illumination system (not shown) which provides light through guides 26, 27, 28 and 29. A free-moving vacuum stage 23, fed from vacuum line 24 through four ports 25, holds the artwork during the alignment process. Glass photomasks used in fabricating thin metal masks are registered for assembly with a tooling frame used in subsequent photolithographic process steps. With the photomask 35 in place and held with four vacuum ports 25, the stage 23, in turn, is held to the base plate 21 from the same vacuum system. A seal is provided with a viscous fluid which also functions as a motion-damping medium. The alignment features 38, 39 are on the photomask 35.

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Critical Alignment for Front to Back Photomask Alignment

The drawing shows the frame to artwork registration system comprising a base plate 21 assembled over an illumination system (not shown) which provides light through guides 26, 27, 28 and 29. A free-moving vacuum stage 23, fed from vacuum line 24 through four ports 25, holds the artwork during the alignment process. Glass photomasks used in fabricating thin metal masks are registered for assembly with a tooling frame used in subsequent photolithographic process steps. With the photomask 35 in place and held with four vacuum ports 25, the stage 23, in turn, is held to the base plate 21 from the same vacuum system. A seal is provided with a viscous fluid which also functions as a motion-damping medium. The alignment features 38, 39 are on the photomask 35. These are positioned over the fixed illuminated reference points by movement of the stage
23. The reference points do not show in the drawing because they are covered by the alignment features. The interim frame 40 is placed over the locating points 32, 33 which are fixed to base plate 21 and are prelocated relative to reference points covered by the alignment features 38, 39. Final bonding is accomplished between frame and artwork with pressure-sensitive adhesive.

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