Browse Prior Art Database

Non-Contact Mask Carrier

IP.com Disclosure Number: IPCOM000043307D
Original Publication Date: 1984-Aug-01
Included in the Prior Art Database: 2005-Feb-04
Document File: 2 page(s) / 39K

Publishing Venue

IBM

Related People

Messina, G: AUTHOR

Abstract

This mask carrier transfers a mask from the carrier box to the mask holder without hand contact. The mask carrier box design eliminates hand contamination and mishandling with possible breakage, and also protects the pellicles. The box holds the mask by the back side and the two lateral sides. The front of the box is open. A latch locks and unlocks the mask in position. A cam arrangement is used to lock the mask in the carrier box or to release it with the mask holder. The mask holder is of standard design with slight modification to fit into the mask carrier. The mask holder 12 (Fig. 1 and 2) can be inserted in the carrier 20 (Fig. 3) for storage and handling. When the mask is needed, the mask holder is slid into the carrier. The latch 11 is retracted, allowing the mask to be extracted from the carrier with the holder.

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Non-Contact Mask Carrier

This mask carrier transfers a mask from the carrier box to the mask holder without hand contact. The mask carrier box design eliminates hand contamination and mishandling with possible breakage, and also protects the pellicles. The box holds the mask by the back side and the two lateral sides. The front of the box is open. A latch locks and unlocks the mask in position. A cam arrangement is used to lock the mask in the carrier box or to release it with the mask holder. The mask holder is of standard design with slight modification to fit into the mask carrier. The mask holder 12 (Fig. 1 and 2) can be inserted in the carrier 20 (Fig. 3) for storage and handling. When the mask is needed, the mask holder is slid into the carrier. The latch 11 is retracted, allowing the mask to be extracted from the carrier with the holder. This operation is done in a simple way with ease, eliminating the difficulty of aligning the mask with the mask holder because self-aligning guides are provided. The masks with pellicles are protected from accidental touching by hand, preventing damage. The mask carrier can accommodate the use of a dedicated mask holder, since the storage of the mask and mask holder is possible. Referring to the drawings, Figs. 1 and 2 are views of the standard mask holder with the present modification. Detent clip 1 applies slight pressure on the mask in order to retain it in the holder when retrieving the mask. Notches 2 and 3 are necessary to clear the restraints in the carrier. Grooves 4 and 5 provide clearance fo...