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Method of Precision Trimming Thin Film Resistors

IP.com Disclosure Number: IPCOM000043325D
Original Publication Date: 1984-Aug-01
Included in the Prior Art Database: 2005-Feb-04
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Block, ML: AUTHOR [+4]

Abstract

A method of precision laser trimming thin film cermet resistors is provided. The cermet resistor is first rough trimmed by laser cutting to between +1% and +2% of the desired final resistance value. This is preferably done with a YAG laser. The resistor is then fine trimmed by laser annealing, such as by spot annealing the material to lower its resistance very precisely to the final desired resistance value. This is preferably done utilizing an argon laser.

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Method of Precision Trimming Thin Film Resistors

A method of precision laser trimming thin film cermet resistors is provided. The cermet resistor is first rough trimmed by laser cutting to between +1% and +2% of the desired final resistance value. This is preferably done with a YAG laser. The resistor is then fine trimmed by laser annealing, such as by spot annealing the material to lower its resistance very precisely to the final desired resistance value. This is preferably done utilizing an argon laser.

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