Browse Prior Art Database

EVAPORATED NiFe/Al2O3 STRUCTURE

IP.com Disclosure Number: IPCOM000043407D
Original Publication Date: 1984-Aug-01
Included in the Prior Art Database: 2005-Feb-04
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Reith, TM: AUTHOR [+2]

Abstract

Nickel-iron has magnetic properties which are very attractive for magnetic head applications. Unfortunately, structures of nickel-iron do not have very good wear characteristics. This problem has been overcome by forming a laminated structure where thin films of nickel-iron are separated by films of harder wearing, but relatively inert materials, such as Al2O3 and SiC. In the past, such laminated structures have been made by alternately evaporatively depositing the nickel-iron from an electron-gun source and sputter depositing the Al2O3. The deposition process can be considerably simplified if both the nickel-iron and Al2O3 laminations are deposited evaporatively. In this method, the laminated nickel-iron/Al2O3/nickel-iron/Al2O3/...etc.

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EVAPORATED NiFe/Al2O3 STRUCTURE

Nickel-iron has magnetic properties which are very attractive for magnetic head applications. Unfortunately, structures of nickel-iron do not have very good wear characteristics. This problem has been overcome by forming a laminated structure where thin films of nickel-iron are separated by films of harder wearing, but relatively inert materials, such as Al2O3 and SiC. In the past, such laminated structures have been made by alternately evaporatively depositing the nickel-iron from an electron-gun source and sputter depositing the Al2O3. The deposition process can be considerably simplified if both the nickel-iron and Al2O3 laminations are deposited evaporatively. In this method, the laminated nickel- iron/Al2O3/nickel-iron/Al2O3/...etc. structure would be deposited entirely by evaporation means, without a vacuum break, in situ, from a multiple pocket electron-gun evaporation source.

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