Browse Prior Art Database

Mask Aligning Fixture for Silicon Wafers

IP.com Disclosure Number: IPCOM000043694D
Original Publication Date: 1984-Sep-01
Included in the Prior Art Database: 2005-Feb-05
Document File: 2 page(s) / 47K

Publishing Venue

IBM

Related People

Christensen, RG: AUTHOR [+2]

Abstract

The disclosed technique is predicated on the use of a mask material that matches the coefficient of expansion of silicon, thus eliminating the need for compensated artwork. The mask is located by two straight pins 1, one located in the "V" notch 2, the other approximately 90Πaway on the periphery of the mask. The silicon wafer 3 is held by vacuum and manipulated under the mask 4 until the fiducials or the via holes are lined up, as viewed through a microscope. The cams 5 are rotated until they touch the outer edge of the silicon wafer. The cams are locked in place by an impactor tool (not shown) that wedges the tapered pins 6 into the tapered hole. Square holes in the cam that slide over the square shank of the locking pin prevent the cam from turning. Spring 7 holds mask 4 in registration with two mask registration pins.

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Mask Aligning Fixture for Silicon Wafers

The disclosed technique is predicated on the use of a mask material that matches the coefficient of expansion of silicon, thus eliminating the need for compensated artwork. The mask is located by two straight pins 1, one located in the "V" notch 2, the other approximately 90OE away on the periphery of the mask. The silicon wafer 3 is held by vacuum and manipulated under the mask 4 until the fiducials or the via holes are lined up, as viewed through a microscope. The cams 5 are rotated until they touch the outer edge of the silicon wafer. The cams are locked in place by an impactor tool (not shown) that wedges the tapered pins 6 into the tapered hole. Square holes in the cam that slide over the square shank of the locking pin prevent the cam from turning. Spring 7 holds mask 4 in registration with two mask registration pins. Wafer spring 8 holds the silicon wafer 3 against cams 5. Wafer/Mask spring 9 is centered on wafer 3. Then the spring clip top plate 12 is placed over the "U" clip posts (not shown). The entire assembly is clipped to the mask holder 11 by "U" clips 10.

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