Browse Prior Art Database

Sound and Vibration Insulation for Sensitive Apparatus

IP.com Disclosure Number: IPCOM000044047D
Original Publication Date: 1984-Oct-01
Included in the Prior Art Database: 2005-Feb-05
Document File: 2 page(s) / 46K

Publishing Venue

IBM

Related People

Binnig, G: AUTHOR [+3]

Abstract

Measuring and manufacturing apparatus working in the nanometer range requires effective insulation from ambient sound and vibrations. It is to be noted that in this range even a flexible thin gold wire can act as an excellent guide for sound waves which might cause noise at the work area. The present damping system comprises a stack 1 of copper plates 2.1...2.n separated by elastic pads 3 the cross section of which decreases from bottom to top of the stack 1, forming individual filter stages with differing resonant frequencies acting as an acoustical mismatch. The sensitive apparatus 4, such as a Scanning Tunneling Microscope, is placed on the top plate 2.n.

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Sound and Vibration Insulation for Sensitive Apparatus

Measuring and manufacturing apparatus working in the nanometer range requires effective insulation from ambient sound and vibrations. It is to be noted that in this range even a flexible thin gold wire can act as an excellent guide for sound waves which might cause noise at the work area. The present damping system comprises a stack 1 of copper plates 2.1...2.n separated by elastic pads 3 the cross section of which decreases from bottom to top of the stack 1, forming individual filter stages with differing resonant frequencies acting as an acoustical mismatch. The sensitive apparatus 4, such as a Scanning Tunneling Microscope, is placed on the top plate 2.n. The electrical conductors 5, 6, supplying current to the measuring or manufacturing apparatus 4, are connected to insulating terminals (not shown) at the lowermost plate 2.1. Separate wires 7, 8 are attached to the terminals and end in like terminals at the next plate 2.2, and so on, to the top plate 2.n and thence to the apparatus 4.

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