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Plasma Smoothing Small Drilled Holes in Polymer Test Heads

IP.com Disclosure Number: IPCOM000044168D
Original Publication Date: 1984-Nov-01
Included in the Prior Art Database: 2005-Feb-05
Document File: 2 page(s) / 63K

Publishing Venue

IBM

Related People

Lo, JC: AUTHOR [+2]

Abstract

Selective plasma etching of the small drilled holes (less than 5 mils) for substrate electrical test head component, provides smooth wall surfaces for the buckling beam placement and allows the buckling beam probes to move freely through these holes. Buckling beam probes 11 slide back and forth through the 5-mil (or less) drilled holes of the dies 12, 13, and 14 and the isolator 15. In order to transmit the contact force to the chip/substrate joints the probe must move freely through these holes. The drilled holes, therefore, must be free of burrs, smear and uneveness.

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Plasma Smoothing Small Drilled Holes in Polymer Test Heads

Selective plasma etching of the small drilled holes (less than 5 mils) for substrate electrical test head component, provides smooth wall surfaces for the buckling beam placement and allows the buckling beam probes to move freely through these holes. Buckling beam probes 11 slide back and forth through the 5-mil (or less) drilled holes of the dies 12, 13, and 14 and the isolator 15. In order to transmit the contact force to the chip/substrate joints the probe must move freely through these holes. The drilled holes, therefore, must be free of burrs, smear and uneveness. The surface of polymers under electron and Ar bombardment releases any absorbed material and provides a clean surface; oxygen-free radicals and excited 02 molecules react with the carbon and hydrogen of polymer molecules which can selectively etch the high point of the drilled hole wall or loosen the large particles from the wall and give a smooth wall surface. After plasma treatment, the surface and drilled holes are smoother and cleaner because of the selective removal of the polymer material. This greatly improves the service life of the test head.

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