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Alignment Stage for Proximity Printing

IP.com Disclosure Number: IPCOM000044333D
Original Publication Date: 1984-Dec-01
Included in the Prior Art Database: 2005-Feb-05
Document File: 2 page(s) / 79K

Publishing Venue

IBM

Related People

Wilson, AD: AUTHOR

Abstract

An alignment stage carried by flexure rods is driven by an actuator/ sensor mechanism which reduces friction so well that the stage can be moved in extremely small increments. The stage may be moved in the X, Y and rotary (in X-Y plane) directions in increments as small as 100. The stage is driven by four piezoelectric crystal stacks 1 which push against flexible cantilevers 2. Cantilevers 2 are attached to rigid frame 10 and move the flexure frame 3 via wires 4. Flexure frame 3 (the alignment stage) is supported by rigid frame 10 via three or more flexure rods 11. The motion of the flexure frame 3 is directly sensed by proximity sensors 5, which supply a feedback signal to PZT high voltage power supply 6. The error in position is determined by subtracting in comparator 7 the actual position from the desired position.

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Alignment Stage for Proximity Printing

An alignment stage carried by flexure rods is driven by an actuator/ sensor mechanism which reduces friction so well that the stage can be moved in extremely small increments. The stage may be moved in the X, Y and rotary (in X-Y plane) directions in increments as small as 100. The stage is driven by four piezoelectric crystal stacks 1 which push against flexible cantilevers 2. Cantilevers 2 are attached to rigid frame 10 and move the flexure frame 3 via wires 4. Flexure frame 3 (the alignment stage) is supported by rigid frame 10 via three or more flexure rods 11. The motion of the flexure frame 3 is directly sensed by proximity sensors 5, which supply a feedback signal to PZT high voltage power supply 6. The error in position is determined by subtracting in comparator 7 the actual position from the desired position. Digital-to-analog converter (DAC) 8 is instructed (e.g., by a computer) to move the stage to a desired position. The required feedback gain is set by amplifier 9. Preloading of the stage is set by adjustment screws 12. The driver electronics for only the X1 driver are shown for clarity. The X, Y1 and Y drivers each have similar driver electronics. To gauge an X translation or motion, the X and X1 drivers are commanded via associated DACs to move equally the desired distance. Rotary motion is achieved by commanding the X and X1 drivers (and the Y and Y1 drivers) to move in opposite directions. Interaction or "cr...