Browse Prior Art Database

Substrate Holder

IP.com Disclosure Number: IPCOM000044365D
Original Publication Date: 1984-Dec-01
Included in the Prior Art Database: 2005-Feb-05
Document File: 2 page(s) / 53K

Publishing Venue

IBM

Related People

Levine, JE: AUTHOR [+3]

Abstract

Thin delicate metal substrates, such as those used in the screening of circuit patterns, are produced by a photolithographic process. A process support frame is described that can carry the part through several sectors, eliminating many transfer operations that are now part of the process. Some of these sectors will include in-process inspections. The frame is light weight and inert to process chemicals. In addition, it can be readily adapted to batch processing where the volume is necessary. The frame will accept a part after the pattern has been exposed through a photo mask in a sensitized polymer. The frame is made non-conductive so it can be used as a plating frame. There will be no build-up of the metal being plated and no stripping will be necessary as with conductive frames. The frame 1, as shown in Fig.

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Substrate Holder

Thin delicate metal substrates, such as those used in the screening of circuit patterns, are produced by a photolithographic process. A process support frame is described that can carry the part through several sectors, eliminating many transfer operations that are now part of the process. Some of these sectors will include in-process inspections. The frame is light weight and inert to process chemicals. In addition, it can be readily adapted to batch processing where the volume is necessary. The frame will accept a part after the pattern has been exposed through a photo mask in a sensitized polymer. The frame is made non- conductive so it can be used as a plating frame. There will be no build-up of the metal being plated and no stripping will be necessary as with conductive frames. The frame 1, as shown in Fig. 1, is made of a non-conductive material and is composed of two major parts shown in Figs. 2 and 3. It includes a detachable handle 2 with a cathode bar clamp 3 and the main workpiece holder 1 which has four attachment points 4 for securing the parts in process. The frames are easily adaptable to individual or batch process. When batching is required, the workpiece 5 and the main holder 1 can be placed in a rack. Parts are inspected while they are held on the main holder 1, allowing them to be moved and handled without damage. Figs. 2 and 3 show the frame configuration that is used for plating. The workpiece 5 is held on the main holder 1,...