Browse Prior Art Database

Alternative Solution to Implementing Redundancy

IP.com Disclosure Number: IPCOM000044626D
Original Publication Date: 1984-Dec-01
Included in the Prior Art Database: 2005-Feb-06
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Bergendahl, AS: AUTHOR [+3]

Abstract

An alternative to current solutions to implementing redundancy by fuse blowing and line shorting eliminates localized high temperature stresses and material spatter associated with laser redundancy. This alternate method uses thermal decomposition of metal carbonyls, performed in the manner suggested for avoiding chrome defect on chrome masks. It is applicable to the repair of defects in metal lines and personalization, as well as redundancy. The alignment of the laser beam can be done as it is done for laser fuse blowing, with the laser power drastically reduced. Local laser heating to less than about 200ŒC will cause the decomposition of commonly available metal carbonyls (such as Cr(CO)6, Fe (CO)5, Ni(CO)4, Mo(CO)6, W(CO)6 . . . ).

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Alternative Solution to Implementing Redundancy

An alternative to current solutions to implementing redundancy by fuse blowing and line shorting eliminates localized high temperature stresses and material spatter associated with laser redundancy. This alternate method uses thermal decomposition of metal carbonyls, performed in the manner suggested for avoiding chrome defect on chrome masks. It is applicable to the repair of defects in metal lines and personalization, as well as redundancy. The alignment of the laser beam can be done as it is done for laser fuse blowing, with the laser power drastically reduced. Local laser heating to less than about 200OEC will cause the decomposition of commonly available metal carbonyls (such as Cr(CO)6, Fe (CO)5, Ni(CO)4, Mo(CO)6, W(CO)6 . . . ).

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