Browse Prior Art Database

Improved Method of Clamping Disks While Spin Coating With Iron Oxide

IP.com Disclosure Number: IPCOM000044658D
Original Publication Date: 1984-Dec-01
Included in the Prior Art Database: 2005-Feb-06
Document File: 2 page(s) / 43K

Publishing Venue

IBM

Related People

Bunnell, K: AUTHOR [+3]

Abstract

Prior designs of mechanisms for clamping disks during spin coating used sliding fingers which slid against wear plates and were operated by a "linear cam". These mechanisms were susceptible to contamination and excessive wear. Any coating, such as iron oxide, which entered the finger chamber caused gumming, poor performance, and excessive machine downtime. The new design eliminates "sticky" finger problems by using a finger which pivots about a pivot point and by eliminating the wear plates. This new design uses a fail-safe compression spring which clamps the disk against the cover during machine failures and/or power failures. The prior design did not guarantee fail-safe operation. The new design with the pivoting finger reduces wear and machine downtime and eliminates contamination.

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Improved Method of Clamping Disks While Spin Coating With Iron Oxide

Prior designs of mechanisms for clamping disks during spin coating used sliding fingers which slid against wear plates and were operated by a "linear cam". These mechanisms were susceptible to contamination and excessive wear. Any coating, such as iron oxide, which entered the finger chamber caused gumming, poor performance, and excessive machine downtime. The new design eliminates "sticky" finger problems by using a finger which pivots about a pivot point and by eliminating the wear plates. This new design uses a fail-safe compression spring which clamps the disk against the cover during machine failures and/or power failures. The prior design did not guarantee fail-safe operation. The new design with the pivoting finger reduces wear and machine downtime and eliminates contamination.

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