Browse Prior Art Database

Green Sheet Transfer

IP.com Disclosure Number: IPCOM000044681D
Original Publication Date: 1984-Dec-01
Included in the Prior Art Database: 2005-Feb-06
Document File: 2 page(s) / 52K

Publishing Venue

IBM

Related People

Haas, RG: AUTHOR [+2]

Abstract

A rapid and precise arrangement for the transfer of green sheet from a handling chuck to a handling chuck is provided for a multilayer ceramic (MLC) punch tool. In the MLC manufacturing punch operation, the first process step involves punching four corner locating holes in a ceramic sheet. The sheet is then transferred to a first position on an X-Y table where via holes are punched and then to a second position on the table where via verification occurs. The sheets are finally transferred to an accept/reject station. The dimensional relationship of the via holes with respect to the four corner locating holes is of a critical nature. In other downstream operations, metallic paste is screened into the via holes and the sheets are stacked for lamination, both operations using the four corner locating holes for location.

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Green Sheet Transfer

A rapid and precise arrangement for the transfer of green sheet from a handling chuck to a handling chuck is provided for a multilayer ceramic (MLC) punch tool. In the MLC manufacturing punch operation, the first process step involves punching four corner locating holes in a ceramic sheet. The sheet is then transferred to a first position on an X-Y table where via holes are punched and then to a second position on the table where via verification occurs. The sheets are finally transferred to an accept/reject station. The dimensional relationship of the via holes with respect to the four corner locating holes is of a critical nature. In other downstream operations, metallic paste is screened into the via holes and the sheets are stacked for lamination, both operations using the four corner locating holes for location. In addition, the ceramic sheets are of a fragile nature and repeated use of the four corner locating holes acts to damage the holes to a point where they are useless for locating the sheets. As mentioned above, in the punch machine transport cycle, the sheet must be placed over locating pins twice, once at punching and once at verification. Accordingly, it is important that the sheets be placed accurately each time over the four locating pins and that no damage be done to the sheet during this operation. Moreover, it is important that no debris be deposited on the sheets during these operations. As shown in the figures, this requirement may be met by using a combination of spring-loaded matching taper pins and a fluidic switching arrangement that provides both vacuum and pressure to the handling chucks. As shown in Fig. 1, green sheet 1 ...