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Conductors for Thin Film Heads

IP.com Disclosure Number: IPCOM000044936D
Original Publication Date: 1983-Jan-01
Included in the Prior Art Database: 2005-Feb-06
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Agnihotri, RK: AUTHOR [+4]

Abstract

Conductors for thin film heads can be formed by depositing a layer of aluminum or an aluminum alloy onto a substrate. A mask material is deposited onto the aluminum layer covering the required conductor pattern and exposing the required insulating sections. The exposed portion of the aluminum is then anodized to form an Al(2)O(3) section between the aluminum conductors.

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Conductors for Thin Film Heads

Conductors for thin film heads can be formed by depositing a layer of aluminum or an aluminum alloy onto a substrate. A mask material is deposited onto the aluminum layer covering the required conductor pattern and exposing the required insulating sections. The exposed portion of the aluminum is then anodized to form an Al(2)O(3) section between the aluminum conductors.

Conductors can be formed in a thin film head with pure processing steps other than using an evaporated gold pattern isolated by sputtered alumina. An alternative method for forming the required conductors for a thin film head can be formed from aluminum or an aluminum alloyed with silicon and/or copper. The first step is to deposit a layer of aluminum or the aluminum alloy onto the substrate, such as a magnetic ferrite substrate. Using conventional processing techniques, a correct negative image of the conductor pattern is put in place on the aluminum layer. This mask material may be polymeric, such as the photoresist or a polyamide, or deposited, such as a metal, metal oxide or silicon oxide. The exposed portion of the aluminum layer is then anodized using conventional techniques, such as electrolysis, where the aluminum film is the anode. The mask material is then removed to provide a resultant conductor pattern that is planar, separated by the alumina insulative areas formed by the anodization process.

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