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Polyimide as an Insulation Layer

IP.com Disclosure Number: IPCOM000044937D
Original Publication Date: 1983-Jan-01
Included in the Prior Art Database: 2005-Feb-06
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Agnihotri, RK: AUTHOR [+2]

Abstract

The conductor metallurgy can be coated with a polyimide layer on thin film magnetic heads. The polyimide can be partially cured and coated with a photoresist to etch the polyimide layer. A photosensitive polyimide can be directly exposed, developed and cured to form the required patterns.

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Polyimide as an Insulation Layer

The conductor metallurgy can be coated with a polyimide layer on thin film magnetic heads. The polyimide can be partially cured and coated with a photoresist to etch the polyimide layer. A photosensitive polyimide can be directly exposed, developed and cured to form the required patterns.

It is known to insulate conductors of a thin film head using a photoresist layer. The photoresist can contain organics which include sulfur and chloride components which can lead to corrosion. The photoresist can be replaced with a polyimide using either of the following processes. The conductor metallurgy can be coated with a polyimide which is partially cured. The polyimide is then coated with a positive photoresist, prebaked, exposed and developed using a developer. The photoresist is developed and the uncoated polyimide is etched. The photoresist is then removed, leaving the polyimide layer which is then cured at a higher temperature.

Another process which can be used is to deposit a photosensitive polyimide layer containing an organic having a diazo moiety. This layer can be exposed directly, developed, and cured. A negative photosensitive polyimide having cross-linking agents, such as inorganic dichromates, can also be used. This polyimide layer is also directly exposed and developed in a solvent such as dimethyl sulfoxide. Polyimides are known to have better adhesion to most of the conductor metallurgies and therefore can provide a good el...