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Cure Monitor for Process Control

IP.com Disclosure Number: IPCOM000045041D
Original Publication Date: 1983-Jan-01
Included in the Prior Art Database: 2005-Feb-06
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Ginsburg, R: AUTHOR [+3]

Abstract

After curing, one or more polyimide workpieces of a production run being processed are sampled and analyzed by a Fourier transform infrared spectrometer for the degree of imidization effected by the curing operation. The sample data is correlated with the known etch parameters of a subsequent etching operation to be performed in the process. The correlated results are used to control the production process either by adjusting the etch parameters online to match the sample results or, alternatively, by adjusting the cure parameters online to match the desired etch parameters, or by any suitable combination of these approaches.

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Cure Monitor for Process Control

After curing, one or more polyimide workpieces of a production run being processed are sampled and analyzed by a Fourier transform infrared spectrometer for the degree of imidization effected by the curing operation. The sample data is correlated with the known etch parameters of a subsequent etching operation to be performed in the process. The correlated results are used to control the production process either by adjusting the etch parameters online to match the sample results or, alternatively, by adjusting the cure parameters online to match the desired etch parameters, or by any suitable combination of these approaches.

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