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Maskless Capping of Molybdenum Features on Alumina Substrates

IP.com Disclosure Number: IPCOM000045072D
Original Publication Date: 1983-Jan-01
Included in the Prior Art Database: 2005-Feb-06
Document File: 2 page(s) / 25K

Publishing Venue

IBM

Related People

Kumar, AH: AUTHOR [+2]

Abstract

Described is a concept for the capping of molybdenum (Mo) metallurgy on alumina ceramic substrates. In this concept the selective capping can be accomplished by depositing (e.g., evaporation) two layers of metal where the bottom layer reaches melting at the heat treatment condition and the top layer is not molten. The bottom and top layers can be made up of single metals or alloys that have the desired characteristics.

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Maskless Capping of Molybdenum Features on Alumina Substrates

Described is a concept for the capping of molybdenum (Mo) metallurgy on alumina ceramic substrates. In this concept the selective capping can be accomplished by depositing (e.g., evaporation) two layers of metal where the bottom layer reaches melting at the heat treatment condition and the top layer is not molten. The bottom and top layers can be made up of single metals or alloys that have the desired characteristics.

For example, the bottom layer can be a low melting metal or an alloy (for example, Au or CuAu, etc). The top layer could also be a single metal or an alloy. This opens up combinations of metals that can be used to selectively cap molybdenum features on a ceramic substrate. However, this makes the restriction that the bottom layer has to be low melting. The primary requirement for the bottom layer is that it should wet the molybdenum, not the ceramic, in the liquid state. The capping is effected by heat treatment at temperatures above the melting point of the bottom layer but below that of the top layer. This is followed by mechanical removal (e.g. , ultrasonically) of the metal coatings from the ceramic surface areas, leaving the molybdenum features coated.

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