Dismiss
InnovationQ will be updated on Sunday, Oct. 22, from 10am ET - noon. You may experience brief service interruptions during that time.
Browse Prior Art Database

Focusing Projection Printing Systems

IP.com Disclosure Number: IPCOM000045088D
Original Publication Date: 1983-Jan-01
Included in the Prior Art Database: 2005-Feb-06
Document File: 2 page(s) / 35K

Publishing Venue

IBM

Related People

Shea, V: AUTHOR

Abstract

A projection printing system for microlithography applications is focused by removing the workholders, for example, a wafer chuck, and installing a glass disk 1 at the wafer plane. Glass disk 1 has an objective lens 2 mounted on the back of the disk and focused at the wafer plane. The machine. A mask 3 is then inserted into the projection printer, and its image can be picked up at the wafer plane. The images are pulled from the machine using either prisms 4 and a ground glass plate 5 (Fig. 1) or fiber optics 6 and a TV monitor (Fig. 2). A nine-site mask and wafer are used for testing, the pattern of which is shown in Fig. 3. With this method, focus, parallelism, relay mirror and overlay checks can be made.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 2

Focusing Projection Printing Systems

A projection printing system for microlithography applications is focused by removing the workholders, for example, a wafer chuck, and installing a glass disk 1 at the wafer plane. Glass disk 1 has an objective lens 2 mounted on the back of the disk and focused at the wafer plane. The machine. A mask 3 is then inserted into the projection printer, and its image can be picked up at the wafer plane. The images are pulled from the machine using either prisms 4 and a ground glass plate 5 (Fig. 1) or fiber optics 6 and a TV monitor (Fig. 2). A nine- site mask and wafer are used for testing, the pattern of which is shown in Fig. 3. With this method, focus, parallelism, relay mirror and overlay checks can be made.

1

Page 2 of 2

2

[This page contains 5 pictures or other non-text objects]