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MLC Laser Sizing Dual Mode Cutting

IP.com Disclosure Number: IPCOM000045211D
Original Publication Date: 1983-Feb-01
Included in the Prior Art Database: 2005-Feb-06
Document File: 3 page(s) / 42K

Publishing Venue

IBM

Related People

Chiaiese, VC: AUTHOR [+2]

Abstract

A CO(2) circulating gas laser, rated at 1.2 kW, continuously discharging infrared laser radiation at a wavelength of 10.6 Mum, is used, is used to cut multilayer "unfired" ceramic substrates. The laser beam has a diameter of 0.0254 cm (0.010 in.) and is stationary. The laminate, mounted on a vacuum chuck assembly, is indexed under the laser beam at table speeds of 101.6 - 317.5 cm (40 - 125 in.) per minute. The required substrate tolerances are +0.0051 cm (0.002 in.) for X,Y dimensions and +/- 0.0076 cm (0.003 in.) for feature to edge centrality.

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MLC Laser Sizing Dual Mode Cutting

A CO(2) circulating gas laser, rated at 1.2 kW, continuously discharging infrared laser radiation at a wavelength of 10.6 Mum, is used, is used to cut multilayer "unfired" ceramic substrates. The laser beam has a diameter of
0.0254 cm (0.010 in.) and is stationary. The laminate, mounted on a vacuum chuck assembly, is indexed under the laser beam at table speeds of 101.6 - 317.5 cm (40 - 125 in.) per minute. The required substrate tolerances are +0.0051 cm (0.002 in.) for X,Y dimensions and +/- 0.0076 cm (0.003 in.) for feature to edge centrality.

Various laser cutting techniques have achieved qualities of cut edge profile and surface texture that are comparable to flat, vertical edges.

This proposed technique eliminates the undesirable cut characteristics unique to a laser cutting unfired MLC (multilayer ceramic) laminates.

Fig. 1 illustrates the undesirable cut conditions of nub and flare.

A nub is a protrusion at the top of the cut that is basically created by material that has been undercut by the laser beam and a hot region of vapors and particles.

A flare is created (only on the corners of the substrates) at the bottom of the cut where the laser beam exits from the confinement of the laminate material into the open air (Figs. 1 and 2).

The following additional concepts of laser cutting are illustrated in Figs. 3 and


4.

When the laser beam is cutting into the laminate, it is enclosed on three sides (270 degrees) by the laminate material (Fig. 3). This containment creates a hot region that is blown dow...