Browse Prior Art Database

Adhesion Promotion for Resist Materials

IP.com Disclosure Number: IPCOM000045239D
Original Publication Date: 1983-Feb-01
Included in the Prior Art Database: 2005-Feb-06
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Henderson, GE: AUTHOR [+3]

Abstract

Described here is the use of a solution of bis (trimethylsilyl) trifluoroacetamide (BSTFA) in 1,1,2 trichloro, 1,2,2, trifluoroethane (FREON Trademark of E.I. du Pont de Nemours & Co. TF), to treat a surface to be coated with resist for the purpose of improving the adhesion of the subsequently formed resist patterns to the surface. The solution is best used in conjunction with a subsequent treatment with a dilute water solution of Partial Derivative aminopropyl triethoxysilane (A1100), as is the conventional practice when using pure BSTFA as the adhesion promoter.

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Adhesion Promotion for Resist Materials

Described here is the use of a solution of bis (trimethylsilyl) trifluoroacetamide (BSTFA) in 1,1,2 trichloro, 1,2,2, trifluoroethane (FREON Trademark of E.I. du Pont de Nemours & Co. TF), to treat a surface to be coated with resist for the purpose of improving the adhesion of the subsequently formed resist patterns to the surface. The solution is best used in conjunction with a subsequent treatment with a dilute water solution of Partial Derivative aminopropyl triethoxysilane (A1100), as is the conventional practice when using pure BSTFA as the adhesion promoter.

The main advantage in the use of BSTFA in FREON TF solution lies in the prohibitive cost of the pure material and in the fact that most of it is irretrievably wasted in a conventional coating process, especially those processes utilizing an automated coater, such as WAFERTRAC Trademark of GCA Corporation.

It has been found that, over a substantial dilution range, BSTFA applied in a FREON TF solution promotes resist adhesion at least as well as pure BSTFA. However, concentrations below about 5 percent (b.v.) tend to be less effective. Concentrations in excess of 10 percent, on the other hand, exhibit a progressively smaller economic advantage over the pure material. A concentration of about 10 percent b.v. is therefore the preferred level in the practice of this invention.

It is not at all obvious that a FREON TF solution of BSTFA should continue to exhibit the adh...