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Gas Panel Glow Site and Defect Enhancement by Citric Acid Etch Procedure

IP.com Disclosure Number: IPCOM000045277D
Original Publication Date: 1983-Feb-01
Included in the Prior Art Database: 2005-Feb-06
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Seehase, H: AUTHOR

Abstract

In plasma panel fabrication, orthogonal conductor arrays are formed on a pair of glass plates and overcoated with a dielectric layer. The dielectric is susceptible to ion bombardment during operation such that a thin overcoat of magnesium oxide is E-beam evaporated over the dielectric surface. However, the thickness of the magnesium oxide (MgO) layer depends on the evaporant angle of incidence. On large size plasma panels, there are a number of MgO growth regions across large substrates which, if untreated, provide significant voltage degradation.

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Gas Panel Glow Site and Defect Enhancement by Citric Acid Etch Procedure

In plasma panel fabrication, orthogonal conductor arrays are formed on a pair of glass plates and overcoated with a dielectric layer. The dielectric is susceptible to ion bombardment during operation such that a thin overcoat of magnesium oxide is E-beam evaporated over the dielectric surface. However, the thickness of the magnesium oxide (MgO) layer depends on the evaporant angle of incidence. On large size plasma panels, there are a number of MgO growth regions across large substrates which, if untreated, provide significant voltage degradation.

During the testing of the panel, various cell permutations are tested. During such operations, the surface of the magnesium oxide is subjected to ion bombardment, resulting in surface texture changes.

MgO surface texture changes brought about by ion bombardment during panel usage are clearly delineated with the aid of a mild citric acid etch.

The etch was tailored specifically to show up very slight differences in surface density of the Mgo film, structural details and plasma panel surface defects. A water pre-bath of samples was found to greatly enhance contrast between ion bombarded MgO regions. The above techniques were used successfully to determine panel failure modes related to panel life, panel MgO film structure and panel contamination.

The citric acid etch procedure is easy to perform without strong chemicals and higher temperatures than a...