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Chip Testing Using Polycrystalline Silicon Resistive Heater Having High Conductivity Connection Points

IP.com Disclosure Number: IPCOM000045287D
Original Publication Date: 1983-Mar-01
Included in the Prior Art Database: 2005-Feb-06
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Hueckel, G: AUTHOR [+3]

Abstract

A resistive heater for a semiconductor chip is formed of polycrystalline silicon. Making the resistor polysilicon gives the advantage that the resistor is formed at a late stage in the chip manufacturing process, thus permitting the heater to be placed at levels above the masterslice. This technique can be applied economically to a small number of chips which may require heating for specific functions, such as testing under heat stress. The ends of the polysilicon resistor are connected to metal conductors.

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Chip Testing Using Polycrystalline Silicon Resistive Heater Having High Conductivity Connection Points

A resistive heater for a semiconductor chip is formed of polycrystalline silicon. Making the resistor polysilicon gives the advantage that the resistor is formed at a late stage in the chip manufacturing process, thus permitting the heater to be placed at levels above the masterslice. This technique can be applied economically to a small number of chips which may require heating for specific functions, such as testing under heat stress. The ends of the polysilicon resistor are connected to metal conductors.

The polysilicon is given a selected conductivity by ion-implant doping in two stages. In the first stage, the polysilicon is given a selected conductivity for resistive heating. In the second stage, the ends of the polysilicon are further doped to provide high conductivity, resulting in less heating.

This construction permits the central portion of the heater to operate at temperatures that would otherwise destroy the metal to polysilicon connections at the ends of the resistor. It also permits the polysilicon to be formed in a shape that provides heat at a specific area of a chip.

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